DISILANE SI2H6 MIXTURES
General Characteristics
Disilane can be diluted with argon, helium, hydrogen or nitrogen in order to provide concentrations of less than 100%. Using disilane in this form can add an additional degree of control to the process, particularly when relatively small amounts of silicon are to be deposited. Mixtures are analyzed prior to shipment to ensure that the concentration is in the range requested. Disilane mixtures are prepared as ordered. Concentrations other than those listed below are available upon request.