Silane can be diluted with argon, helium, hydrogen or nitrogen in order to provide concentrations of less than 100%. Using Silane in this form can add an additional degree of control to the process, particularly when relatively small amounts of silicon are to be deposited. All mixtures are analyzed prior to shippment to ensure that the concentration is in the range requested.

Silane mixtures are prepared as ordered. Concentrations other than those listed below are available upon request.