TRICHLOROSILANE SiCl3H
General Characteristics
Trichlorosilane is a corrosive, colorless, flammable liquid with a suffocating odor. The vapors are irritating to the mucous membranes and form dense fumes when exposed to humid air. It hydrolyses rapidly in moist air, releasing hydrogen chloride. It is shipped in special stainless steel containers, capable of delivering either vapor or liquid.
Physical Information
Molecular Weight
135.45
Flammability Limits in air
7.0 - 83.0%
Density, Liquid @ Boiling Point,
1 atm
12.4lb/gal (1.48g/m)
Boiling Point
89.4&degF (31.9&degC)
Melting Point
-94&degF (-70&degC)
Triple Point @ 5.11 atm
-69.9&degF (-56.6&degC)
Critical Temperature
468&degF (242.5&degC)
Critical Pressure
499.7 psia (34.5 bar)
Toxicity (as HCl, a 3 to 1 ratio)
PEL/TLV as HCl
5 ppm
LC50
1040 ppm